N-331.20U 新产品!
Vacuum compatible PICMAWalk walking drive, 55 mm travel range (open loop); 50 N drive force, 12 mm/s maximum velocity; vacuum compatible to 10⁻⁹ hPa; 1 m cable length
新产品
N-331.xxU Vacuum-Compatible PICMAWalk Walking Drive
OEM Walking Drive for Durable Applications with up to 12 mm/s Velocity and 50 N Drive Force
- Vacuum compatible up to 10-9 hPa
- Robust walking drive for industrial use with PICMA® technology for extreme durability
- Fastest and strongest drive of its size class
- Precise, nanometer precision positioning of loads up to 5 kg
- Plug-and-play, thanks to PI proprietary controller technology
N-33x drives are able to perform steps of less than 5 nm. Measured by an interferometer.
N-331.2xU, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
N-331.xxU Vacuum-Compatible PICMAWalk Walking Drive
产品描述
规格
下载
报价/订购
Application fields
- Motion in strong magnetic fields and in a vacuum
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
Suitable for sophisticated vacuum applications
N-331.xxU PICMAWalk walking drives are designed vacuum compatible. Special versions of the drives are available for operation in strong magnetic fields. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.
Outstanding lifetime due to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Nanometer precision and high feed force with PiezoWalk® walking drives
In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Specifications
Select a travel range:
| Motion | N-331.20U | N-331.24U | Tolerance |
|---|---|---|---|
| Active axes | X | X | |
| Travel range in X, open loop | 55 mm | 55 mm | ±0,5 mm |
| Travel range in X (analog mode) | 20 µm | 20 µm | typ. |
| Operating frequency in full step mode | 0.6 kHz | 0.6 kHz | |
| Velocity (100% duty cycle, full-step mode) | 12 mm/s | 12 mm/s | max. |
| Velocity (100% duty cycle, nanostepping mode) | 10 mm/s | 10 mm/s | max. |
| Travel range in X | 50 mm | ||
| Positioning | N-331.20U | N-331.24U | Tolerance |
| Minimum incremental motion in X | 0.01 µm | 0.01 µm | typ. |
| Resolution in X, open loop | 0.02 nm | 0.02 nm | typ. |
| Integrated sensor | Incremental linear encoder | ||
| System resolution in X | 4 nm | ||
| Drive Properties | N-331.20U | N-331.24U | Tolerance |
| Drive type | PICMAWalk | PICMAWalk | |
| Operating voltage | -20 to 120 V | -20 to 120 V | |
| Drive force in positive direction of motion in X | 50 N | 50 N | min. |
| Drive force in negative direction of motion in X | 50 N | 50 N | min. |
| Mechanical Properties | N-331.20U | N-331.24U | Tolerance |
| Holding force in X, passive | 60 N | 60 N | min. |
| Moved mass in X, unloaded | 140 g | 140 g | |
| Overall mass | 610 g | 610 g | |
| Material | Aluminum, stainless steel | Aluminum, stainless steel | |
| Endurance at 10E-9 hPa, 15% duty cycle | > 2 km | > 2 km | |
| Miscellaneous | N-331.20U | N-331.24U | Tolerance |
| Operating temperature range | 0 to 50 °C | 0 to 50 °C | |
| Vacuum class | 10⁻⁹ hPa | 10⁻⁹ hPa | |
| Connector | LEMO FGJ.2B.319.CLLD52 | LEMO FGJ.2B.319.CLLD52 | |
| Cable length | 1 m | 1 m | |
| Recommended controllers / drivers | E-712.1AN • E-712.2AN • E 712.3AN | E-712.1AN • E-712.2AN • E 712.3AN |
Travel range in X, open loop: From one mechanical hard stop of the runner to the other mechanical hard stop, only in open-loop operation
Velocity (100 % duty cycle, full-step mode): depends on the controller, the load, and the servo parameters; in this case an E-712.AN controller is used. For longer positioning processes, operate the linear actuator with this controller at a velocity below 3 mm/s.
Operating frequency in full-step mode: When operated with a digital controller with 25 W peak power output
All specifications based on room temperature (22 °C ±3 °C).
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
N-331.24U 新产品!
Vacuum compatible PICMAWalk walking drive, 50 mm travel range; 50 N drive force, 12 mm/s maximum velocity; incremental linear encoder; vacuum compatible to 10⁻⁹ hPa; 1 m cable length
