Application fields
Thanks to its small footprint, the vacuum variant of the H-811 is well suited for installation in vacuum chambers. Its high level of precision enables the H-811.I2V to execute alignment processes extremely precisely and efficiently. In such areas, it makes a significant contribution to boosting the productivity of complex manufacturing processes and measuring procedures.
High dynamics combined with extreme reliability
The parallel-kinematic arrangement enables the hexapod to perform motion in 6 axes in an extremely compact design. Thanks to the use of brushless DC motors and its stiff mechanical design, the H-811 offers the dynamics required for active alignment applications, even if external interference (e.g., in the case of gluing processes) occurs. Extensive software tools provide support by simplifying the system tuning and making automatic routines available for alignment to an external analog control signal.
Motion simulation for protecting the overall system
The PIVirtualMove software, which can be downloaded free of charge, simulates the travel range, the alignment, and the permissible forces and torques of the H-811 to facilitate an optimum system configuration. In this context, both the chosen center of rotation and the center of gravity of the load are taken into consideration.
Work and tool coordinate systems and an emulation tool are included in the free software package belonging to the scope of delivery of the hexapod controller. The tools provided help to protect critical components such as optical or photonic parts.
| Motion | H-811.I2V | Tolerance |
|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 17 mm | |
| Travel range in Y | ± 16 mm | |
| Travel range in Z | ± 6.5 mm | |
| Rotation range in θX | ± 10 ° | |
| Rotation range in θY | ± 10 ° | |
| Rotation range in θZ | ± 21 ° | |
| Maximum velocity in X | 10 mm/s | |
| Recommended velocity in X | 5 mm/s | |
| Maximum velocity in Y | 10 mm/s | |
| Recommended velocity in Y | 5 mm/s | |
| Maximum velocity in Z | 10 mm/s | |
| Recommended velocity in Z | 5 mm/s | |
| Maximum angular velocity in θX | 250 mrad/s | |
| Recommended angular velocity in θX | 120 mrad/s | |
| Maximum angular velocity in θY | 250 mrad/s | |
| Recommended angular velocity in θY | 120 mrad/s | |
| Maximum angular velocity in θZ | 250 mrad/s | |
| Recommended angular velocity in θZ | 120 mrad/s | |
| Positioning | H-811.I2V | Tolerance |
| Minimum incremental motion in X | 0.2 µm | typ. |
| Minimum incremental motion in Y | 0.2 µm | typ. |
| Minimum incremental motion in Z | 0.08 µm | typ. |
| Minimum incremental motion in θX | 2.5 µrad | typ. |
| Minimum incremental motion in θY | 2.5 µrad | typ. |
| Minimum incremental motion in θZ | 5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.15 µm | typ. |
| Unidirectional repeatability in Y | ± 0.15 µm | typ. |
| Unidirectional repeatability in Z | ± 0.06 µm | typ. |
| Unidirectional repeatability in θX | ± 2 µrad | typ. |
| Unidirectional repeatability in θY | ± 2 µrad | typ. |
| Unidirectional repeatability in θZ | ± 3 µrad | typ. |
| Backlash in X | 0.2 µm | typ. |
| Backlash in Y | 0.2 µm | typ. |
| Backlash in Z | 0.06 µm | typ. |
| Backlash in θX | 2 µrad | typ. |
| Backlash in θY | 2 µrad | typ. |
| Backlash in θZ | 4 µrad | typ. |
| Drive Properties | H-811.I2V | Tolerance |
| Drive type | Brushless DC motor | |
| Mechanical Properties | H-811.I2V | Tolerance |
| Stiffness in X | 0.7 N/µm | |
| Stiffness in Y | 0.7 N/µm | |
| Stiffness in Z | 8 N/µm | |
| Maximum load capacity, base plate in any orientation | 2.5 kg | |
| Maximum load capacity, base plate horizontal | 5 kg | |
| Maximum holding force, base plate in any orientation | 2.5 N | |
| Maximum holding force, base plate horizontal | 15 N | |
| Overall mass | 2.2 kg | |
| Material | Stainless steel, aluminum | |
| Miscellaneous | H-811.I2V | Tolerance |
| Operating temperature range | 0 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | |
| Connector for supply voltage | LEMO | |
| Cable length | 2 m | |
| Outer diameter power supply cable | 4.7 mm | |
| Minimum bending radius for fixed installation, power supply | 50 mm | |
| Outer diameter data transmission cable | 6.6 mm | |
| Minimum bending radius for fixed installation, data transmission | 70 mm | |
| Recommended controllers/drivers | C-887.5x |
The cables fixed to the H-811.I2V are not drag chain compatible.
Note on outer diameter data transmission cable: The data transmission connection consists of 2 cables that end in one connector. The specified diameter applies for each cable.
Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
With continuous operation in a vacuum, heat generation may necessitate limiting the operating parameters.
When measuring position specifications, typical velocity is used. The data is included in the delivery of the product in the form of a measurement report and is stored at PI.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Miniature hexapod; BLDC motor; vacuum compatible to 10-6hPa; 5 kg payload; 10 mm/s velocity; 2 m cable length (vacuum side); feedthroughs. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
点击“报价/订购”
将产品类型添加到报价列表
填写报价单
向PI发送报价需求
我们会尽快与您联系
通过电子邮件或电话从当地PI销售工程师处快速获取解答。
PI提供高精度驱动器，其可用作EtherCAT从控制器，或与ACS运动控制器集成后用作主控制器，或在现有结构中用作第二主控制器。
认真处理、充足空间：PI不仅具有验定材料、部件和最终产品的必要设备，同时也具有高真空和超高真空定位系统方面的多年经验。
运动模拟器具对运动动力学具有较高的要求（振动器）。
六足位移台平台适用于在所有六个自由度（即三根线性轴和三根旋转轴）实现负载的准确定位和校准。
在多轴并联系统中，所有促动器直接作用于单一运动平台。
在多轴并联系统中，所有促动器直接作用于单一运动平台。这意味着所有轴都被设计成具有相同的动态特性，从而显著减小移动质量。六轴用于在六个自由度上（即三条线性轴和三条旋转轴）实现负载的移动和精准定位、校准以及移置。
![[Translate to Chinese:] Optics Hutch Instrumentation](/fileadmin/_processed_/4/7/csm_UHV-compatible_SpaceFAB_381e8fd357.jpg "[Translate to Chinese:] Optics Hutch Instrumentation")
